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1
A User's Guide to Vacuum Technology - 247페이지
CHAPTER 14 Getter and Ion Pumps Getter and ion pumps are capture pumps. They operate by ... As a result, two or more capture processes are usually combined to pump effectively a wide range of active and noble gases. Getter and ion ...
2
Basic Vacuum Technology, 2nd edition - 77페이지
Figure 3.28 shows a pumping element of a large pump where many elements are combined to give high pumping speed. ... 3.3.3 The sputter ion pump The sputter ion pump is a getter ion pump in which ionised gas is accelerated towards a ...
3
Physics of Surfaces and Interfaces - 76페이지
Since the final pressure of oil- free roughening pumps is about 10 Pa a molecular drag pump (working on the principle of an archimedian screw) is placed between the turbo-pump and the roughening pump. Ion getter pumps come as diodes ...
4
Capture Pumping Technology - 178페이지
16) Herb, R.G., Pauly, T., Welton, R.D., Fisher, KJ., "Sublimation and Ion Pumping in Getter-Ion Pumps", Rev. Sci. Inst. 35(5), 573 (1964). 17) Maliakal, J.C., Limon, P J., Arden, E.E., Herb, R.G., "Orbitron Pump of 30-cm Diameter", J. Vac. Sci.
5
Handbook of Physical Vapor Deposition (PVD) Processing - 723페이지
are sometimes called Non-evaporative getter pumps. See also Getter pump; Ion pump; Sublimation pump. Vacuum pump, ion pump A capture-type vacuum pump where a getter material is deposited by sputtering and gaseous ions are ...
6
The Principles and Practice of Electron Microscopy - 391페이지
A positive ion which has been accelerated towards the cathode (negative electrode) expends its energy in ejecting ... most commonly used ion pump is the getter-ion sputtering pump (Figure A 1.8), generally shortened to sputter-ion pump or, ...
7
Handbook of Vacuum Technology - 482페이지
Vacuum technology usually relies on combinations of sputter ion pumps or turbomolecular pumps and titanium ... Due to the high hydrogen pumping speed of the getter pump, producible ultimate pressure is no longer limited by the hydrogen ...
8
Liquid Ring Vacuum Pumps, Compressors and Systems: ... - 121페이지
Solid getter pump A solid getter pump is a getter pump in which the gas is sorbed on the surfaces and inside the solid getter material. Solid getter pumps work in the range of viscous flow and Knudsen flow. Ion getter pump An ion getter pump ...
Evaporation getter-ion pump Granville-Phillips Electro Ion Vacuum Pump Series 220: Baffled pumping speed for nitrogen: 1600 litre/second in 6 inch size 3200 litre/second in 8 inch size Bakeout temperature (max): 300°C Sublimator: large ...
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The Foundations of Vacuum Coating Technology - 145페이지
Vacuum gauge, ionization, cold cathode gauge A vacuum gauge that uses ion current formed by electron- atom collisions as an ... Vacuum pump, ion pump A capture-type vacuum pump where a getter material is deposited by sputtering and ...
