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1
Characterization of
ALD Copper Thin Films on Palladium Seed ...
Platinum was demonstrated to be a viable alternative seed layer for copper ALD growth, leading to pure copper films, in contrast with results for palladium. This is because hydrogen adsorption does not induce platinum surface segregation.
2
Novel Applications of SU-8 and
ALD Materials in Fabrication ...
This work explores further miniaturization of liquid lenses using electrowetting on dielectric (EWOD) technology and micro-/nano-eletro-mechanical resonators and switches by surface micro- and nano-machining techniques.
3
Atomic Layer Deposition Applications 4
Selective deposition was not observed in Co plasma enhanced ALD (PE- ALD)
by CoCp2 and NH3 plasma, which was found to be due to the rapid degradation
of OTS SAM. In contrast to PE-ALD, thermal ALD Co by Co(AMD)2 and LL ...
4
Atomic Layer Deposition Applications 6
The Al2O3 film was deposited by thermal ALD and annealed for 10 min at 400
oC before plasma exposure. Lines serve as a guide to the eye. Conclusions In
summary, from the experiments it was found that during plasma-assisted ALD of ...
J. W. Elam, A. Londergan, S. De Gendt,
2010
5
ALD Growth of a Novel Mixed-phase Barrier for Seedless ...
One potential solution involves the use of a bi-layer configuration such as ALD
TaN/ALD Ru to enable both barrier and plate/adhesive properties.4 However, a
bi-layer stack is intrinsically not scalable to smaller thickness (i.e. 5 nm thick or ...
6
Chest Radiology: The Essentials
List four broad categories of acute alveolar lung disease (ALD). 2. List five broad
categories of chronic ALD. 3. Name three pulmonary- renal syndromes. 4. List
five common causes of acute respiratory distress syndrome. 5. Suggest a specific
...
Jannette Collins, Eric J. Stern,
2012
7
Materials and Electrical Properties of
ALD Zirconium Dioxide ...
It is demonstrated that capacitance densities greater than that of 1.5 nm SiO2 films are obtainable using various silicon surfaces preparations.
Charles Michael Perkins,
2007
aIn all forms of ALD, MRI abnormalities precede clinical findings. abnormal
withdrawal, aggression,poor memory, or difficulties in school. Ultimately,
progressive dementia is evident. Visual loss with optic atrophy is a consistent
feature owing to ...
Lewis P. Rowland, Timothy A. Pedley,
2010
9
Handbook of Silicon Based MEMS Materials and Technologies
Epitaxy (ALE)” [4], originally for the production of electroluminescent thin film
displays, which became the only commercial application of ALD for almost twenty
years. A renewed interest in ALD, with focus on semiconductor manufacturing, ...
Veikko Lindroos, Sami Franssila, Markku Tilli,
2009
10
Clinical Studies in Medical Biochemistry
Adrenoleukodystrophy Accumulation of saturated VLCFA, reported in 1976, is an
isolated biochemical abnormality so far in X-linked ALD. This finding has been
seen in tissues and body fluids of patients with different clinical phenotypes, ...
Robert H. Glew, Yoshifumi Ninomiya,
1997