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1
Advances in Polyimide: Science and Technology
TABLE II: THICKNESS CHANGES OF POLYIMIDE FILMS BETWEEN SOFTBAKE
AND HARDBAKE FTIR: Sodium chloride discs coated with the commercial
polyimide precursor solution were softbaked (1 min at 110° C on the MTI hotplate
and ...
2
Principles of Lithography
Harry J. Levinson. 3.3 Resist spin coating, softbake, and hardbake Resist is
applied to the wafer by a spin coating. In this method, photoresist is dispensed in
liquid form onto the wafer (Fig. 3.8 and Fig. 3.9). The wafer is then spun about its
axis ...
3
Silicon Photonics: An Introduction
(c) Following hardbake, the desired pattern is printed in the photoresist ready for
transfer to the wafer is positive or negative, the solution dissolves the activated
resist (or unactivated resist), leaving behind the resist pattern. Hardbake The final
...
Graham T. Reed, Andrew P. Knights, 2004
4
MEMS Materials and Processes Handbook
(Optional) Hardbake at 115◦C for 1 min on the hot plate, or 20–30 min in the oven
. The hardbake serves to promote adhesion during wet etching or increase
selectivity during dry etching. This case study is generic with some processing ...
Reza Ghodssi, Pinyen Lin, 2011
5
Working with Machines: The Nuts and Bolts of Lean Operations ...
4. Develop. Like a photographic plate, the wafer goes through a development
process that strips the unexposed photoresist. 5. Hardbake. The wafer enters
another oven, hotter than the first, in which the remaining photoresist is hardened
into ...
There were two exceptions, Wiggy and Hardbake, and they forced me to run. But
I accepted that — I was quite content to be the third-best fighter in the class. At the
first opportunity, I announced to the class that I could lick anyone except Wiggy ...
^t'/Ùtlff almond oily flavo(u)r ïîfCli fit almond flavo(u)r ÊCfë chufa nut $tli almond
meal almond hardbake Stitlfi hardbake -pHzWl almond cake cftlÄnSÄ almond
decorticator ^fzSë almond cake; frangipane; marzipan cake ïftfxfôï marchpane ...
8
Micro Mechanical Systems: Principles and Technology
The wafers now undergo a hardbake; typical conditions are 150 to 180°C for 1
hour in a convection oven. The purpose of the hardbake is to remove any
remaining solvents and rinse water from the photoresist, and to provide even
more ...
T. Fukuda, Wolfgang Menz, 1998
9
German Dictionary of Microelectronics: English-German, ...
... —up prevention Vorbeugung /gegen Blockierung hard-addressed hart
adressiert - array logic feste Anordnungslogik f - bake s. hardbake - chrome
defect Hartchromdefekt m -configured hartkonfiguriert — contact exposure
Kontaktbelichtung ...
10
Integrated circuit metrology, inspection, and process ...
TABLE 5 OPTIMUM PROCESS CONDITIONS Softbake Temperature 120°C
Softbake Time 120 sec Hardbake Temperature 110°C to 130°C For the entire
hardbake range shown (indeed, even up to 140°C) and at the listed optimum
softbake ...
Kevin M. Monahan, Society of Photo-optical Instrumentation Engineers, 1989
WIADOMOŚCI, KTÓRE ZAWIERAJĄ SŁOWO «HARDBAKE»
Sprawdź, o czym dyskutuje się w prasie krajowej i zagranicznej oraz jak jest stosowane słowo
hardbake w wiadomościach.
REVIEW: Red Riding Hood by the Harbour View Players
Richard Navoy's endearing performance as Dame Granny Hardbake was a complete joy. He engaged the audience from the word go and ... «This is The West Country, Sty 15»
Fine chocolates at Kitchen Elf
Kitchen Elf also offers Callebaut hardbake chips, Ghirardelli unsweetened cocoa, Guittard couverture and chips, Belcolade compound ... «Philippine Star, Lis 14»
