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1
Handbook of Semiconductor Interconnection Technology
5.6.6 Ultra-High Frequency (UHF) Source In this reactor, a spokewise antenna is
located on a quartz plate separating it from the vacuum chamber; this is
illustrated in Fig. I-36. The ultra-high-frequency (500 MHz) power propagating
between ...
Geraldine Cogin Schwartz, K.V. Srikrishnan, Arthur Bross, 1997
2
Japanese Journal of Applied Physics: Regular papers & short ...
The spokewise antenna is located on a quartz plate, not touching the vacuum
chamber. The antenna system is shown in more detail in Fig. 2. The length of
each spoke is 13 cm, or about 1/4 the length of a 500-Mhz wave. The design of
the ...
Japan (Received April 16, 1998; accepied for publication July 8, 1998) A low-
temperature, uniform, and high-density microwave plasma (2.45 GHz) is
produced utilizing a spokewise antenna with no use of magnetic field. The
plasma ...
4
Japanese Journal of Applied Physics
The detailed description of the UHF plasma source employed in this study is
given elsewhere.1,2' Briefly, a 500-MHz UHF power emitted from a spokewise
antenna in the source is introduced onto the plasma through a 2-cm-thick quartz
...
Institute of Pure and Applied Physics, 1998
... through the spokewise antenna, low- electron-temperature (2 eV) and high-
density (-10" cm"3) plasmas can be easily produced. The UHF plasma also
produces non-Maxwellian electron energy distributions. In this study, we
developed a ...
Electrochemical Society, Electrochemical society (Etats-Unis), Electrochemical society. Meeting, 1999
6
NEC Research & Development
2. EXPERIMENT A new non-perfluorocarbon gas chemistry [8- 11] for generating
selected radicals in a UHF plasma has been developed. Our UHF plasma source
[12-18], which has a spokewise antenna, is shown in Fig. 1. We found that CF3I ...
To use, move the sander evenly over the work, avoiding an accumulation of
wood dust under the abrasive. Rotary Sander Gets into Tight Spots TABS of
sandpaper, backed by brush bristles sticking out spokewise, give this tool its
flexibility in ...
8
Eōthen: Or Traces of Travel Brought Home from the East
My quilt, and my pelisse, and my cloak, were spread out so that I might lie
spokewise, with my feet towards the central fire. I wrapped my limbs daintily
round, and gave myself positive orders to sleep like a veteran soldier. But I found
that my ...
Alexander William Kinglake, 1849
In other words, its polarization would be arranged spokewise, or, to use the
technical term, radially; and the corona, when examined as before, would vary in
color on different sides of the sun. I have already drawn largely, perhaps too
largely, ...
10
Cranium-Crushing Crosswords
58 Bit 59 Leblanc's Lupin 60 Ordinal ending 61 Kind of mocha DOWN 1 Stop
speaking 2 Spokewise 3 Willow locale 4 2000 PGA Championship runner-up 5
Combined curricula 6 Cager Montross 7 Activists' assertion, maybe 8 "The Boys
in ...
